JPH0167735U - - Google Patents
Info
- Publication number
- JPH0167735U JPH0167735U JP1987163475U JP16347587U JPH0167735U JP H0167735 U JPH0167735 U JP H0167735U JP 1987163475 U JP1987163475 U JP 1987163475U JP 16347587 U JP16347587 U JP 16347587U JP H0167735 U JPH0167735 U JP H0167735U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- substrate
- spin
- drying
- rotate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000001035 drying Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000004528 spin coating Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987163475U JPH0167735U (en]) | 1987-10-26 | 1987-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987163475U JPH0167735U (en]) | 1987-10-26 | 1987-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0167735U true JPH0167735U (en]) | 1989-05-01 |
Family
ID=31448229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987163475U Pending JPH0167735U (en]) | 1987-10-26 | 1987-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0167735U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03101866A (ja) * | 1989-09-13 | 1991-04-26 | Tokyo Ohka Kogyo Co Ltd | 被膜形成装置 |
-
1987
- 1987-10-26 JP JP1987163475U patent/JPH0167735U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03101866A (ja) * | 1989-09-13 | 1991-04-26 | Tokyo Ohka Kogyo Co Ltd | 被膜形成装置 |